What Makes High Enthalpy Yttrium Oxide Suspension Plasma Spray the Best Choice for Coating Semiconductor Etch Chambers
During semiconductor manufacturing, wafers undergo a plasma etching process in a specially designed metal etching chamber. A ceramic coating is typically applied to the chamber walls to protect the metal from the erosive and corrosive effects of the etching process. Thermal spray is a commonly used method for applying this ceramic coating, which extends the […]